Overview Introduction, Evoluation of MEMS, Microsensors. MEMS Materials, Microelectronic Technology, Etch Stop Techniques, Fabrication of Micromachined Microstructure, Microstereolithography, MEMS Pressure and Flow Sensor, MEMS Gyro Sensor, MEMS for Space Application, Wafer Bonding, Packaging of MEMS, MEMS for Biomedical Applications (Bio-MEMS).
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| Expiry period | Lifetime | ||
| Made in | English | ||
| Last updated at | Wed Dec 1969 | ||
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| Total lectures | 31 | ||
| Total quizzes | 0 | ||
| Total duration | 30:55:14 Hours | ||
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| Number of reviews | 0 | ||
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| Short description | Overview Introduction, Evoluation of MEMS, Microsensors. MEMS Materials, Microelectronic Technology, Etch Stop Techniques, Fabrication of Micromachined Microstructure, Microstereolithography, MEMS Pressure and Flow Sensor, MEMS Gyro Sensor, MEMS for Space Application, Wafer Bonding, Packaging of MEMS, MEMS for Biomedical Applications (Bio-MEMS). | ||
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